SiON-Based Integrated Optics Devices for WDM Networks
نویسندگان
چکیده
We have used silicon-oxy-nitride (SiON) waveguide technology to fabricate low-loss, compact and tunable integrated optical devices. Examples of devices realized in this technology include thermo-optically tunable gain equalizers and flat-passband add-drop filters.
منابع مشابه
Silicon oxynitride in integrated optics
I . INTRODUCTION Integrated optics (IO) devices for application in telecommunication are highly demanding on low insertion loss, efficient fiber-to-chip coupling, high compactness (small bending radii) and polarization independent operation. In most operating communication devices developed within the last decade, low-index contrast waveguiding structures have been applied El]. The large channe...
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